Special Design for Silicon Carbide Grinding Types Gc2000 - Silicon Carbide Cantilevers Paddle – Anteli
Special Design for Silicon Carbide Grinding Types Gc2000 - Silicon Carbide Cantilevers Paddle – Anteli Detail:
Product detailed and application
Large wafer loading force silicon carbide SiSiC / SiC cantilever paddle / beam is suitable for a robot automatic loading and handling system because it has stable performance, non-deformation in high temperature and large wafer loading force. Since the section of the cantilever paddle is stable with no deformation, it is possible to make larger size wafer using existing furnace tubes. Large wafer loading force silicon carbide SiSiC / SiC cantilever paddle / beam can be applied to LPVCD on basis of its similar thermal expansion coefficient with LPVCD coating, which greatly prolongs the maintenance and cleaning cycle,and significantly reduce pollutants.
Technical parameters of reaction bonded silicon carbide RBSIC :
| item | unit | data |
| Temperature of application | ℃ | 1380 |
| density | G/cm3 | >=3.02 |
| Open porosity | % | <0.1 |
| Moh’s Scale of Hardness | 13 | |
| Bending strength | Mpa | 250(20℃) |
| Mpa | 280(1200℃) | |
| Modulus of elasticity | Gpa | 330(20℃) |
| Gpa | 300(1200℃) | |
| Thermal conductivity | W/m.k | 45(1200℃) |
| Coefficient of thermal expansion | K-1*10-6 | 4.5 |
| Acid-proof alkaline | Excellent |
Features:
a. It does not deform at high temperature and the wafer loading force is large;
b. Excellent thermal shock resistance and long service life;
c. The thermal expansion coefficient of the cantilever paddle is extremely small, which greatly prolongs the maintenance and cleaning cycle;
and drastically reduce pollutants
Other kiln furniture made by silicon carbide ceramic
Besides Reaction sintered silicon carbide SiSiC cantilever paddle for wafer loading, we also produce other kiln furniture including RBSIC/SISIC silicon carbide beams, nozzle tubes, spiral nozzle tube, swirl nozzle tube, oxide bonded SIC silicon carbide batts/setter plate and RBSIC cooling pipes.
Wear resistant RBSIC/SISIC silicon carbide products
Because our RBSIC/SISIC silicon carbide product have the advantages of excellent wear resistance, corrosion resistance and long service life, it can also be made into wear resistant linings which can be easily installed in processing pipes or cyclones.
Product detail pictures:
Related Product Guide:
SiC Conference of Four Provinces and Regions in Western China
We are experienced manufacturer. Wining the majority from the crucial certifications of its market for Special Design for Silicon Carbide Grinding Types Gc2000 - Silicon Carbide Cantilevers Paddle – Anteli , The product will supply to all over the world, such as: Oman, Surabaya, Serbia, We integrate design, manufacture and export together with more than 100 skillful workers, strict quality controlling system and experienced technology.We keep long term business relationships with wholesaler and distributors form more than 50 countries, such as USA, UK, Canada, Europe and Africa etc.
This supplier stick to the principle of "Quality first, Honesty as base", it is absolutely to be trust.



