professional factory for Silicon Carbide Power - Silicon Carbide Cantilevers Paddle – Anteli
professional factory for Silicon Carbide Power - Silicon Carbide Cantilevers Paddle – Anteli Detail:
Product detailed and application
Large wafer loading force silicon carbide SiSiC / SiC cantilever paddle / beam is suitable for a robot automatic loading and handling system because it has stable performance, non-deformation in high temperature and large wafer loading force. Since the section of the cantilever paddle is stable with no deformation, it is possible to make larger size wafer using existing furnace tubes. Large wafer loading force silicon carbide SiSiC / SiC cantilever paddle / beam can be applied to LPVCD on basis of its similar thermal expansion coefficient with LPVCD coating, which greatly prolongs the maintenance and cleaning cycle,and significantly reduce pollutants.
Technical parameters of reaction bonded silicon carbide RBSIC :
| item | unit | data |
| Temperature of application | ℃ | 1380 |
| density | G/cm3 | >=3.02 |
| Open porosity | % | <0.1 |
| Moh’s Scale of Hardness | 13 | |
| Bending strength | Mpa | 250(20℃) |
| Mpa | 280(1200℃) | |
| Modulus of elasticity | Gpa | 330(20℃) |
| Gpa | 300(1200℃) | |
| Thermal conductivity | W/m.k | 45(1200℃) |
| Coefficient of thermal expansion | K-1*10-6 | 4.5 |
| Acid-proof alkaline | Excellent |
Features:
a. It does not deform at high temperature and the wafer loading force is large;
b. Excellent thermal shock resistance and long service life;
c. The thermal expansion coefficient of the cantilever paddle is extremely small, which greatly prolongs the maintenance and cleaning cycle;
and drastically reduce pollutants
Other kiln furniture made by silicon carbide ceramic
Besides Reaction sintered silicon carbide SiSiC cantilever paddle for wafer loading, we also produce other kiln furniture including RBSIC/SISIC silicon carbide beams, nozzle tubes, spiral nozzle tube, swirl nozzle tube, oxide bonded SIC silicon carbide batts/setter plate and RBSIC cooling pipes.
Wear resistant RBSIC/SISIC silicon carbide products
Because our RBSIC/SISIC silicon carbide product have the advantages of excellent wear resistance, corrosion resistance and long service life, it can also be made into wear resistant linings which can be easily installed in processing pipes or cyclones.
Product detail pictures:
Related Product Guide:
SiC Conference of Four Provinces and Regions in Western China
Using a complete scientific top quality management program, great high-quality and fantastic religion, we win great track record and occupied this area for professional factory for Silicon Carbide Power - Silicon Carbide Cantilevers Paddle – Anteli , The product will supply to all over the world, such as: Mauritius, Sierra Leone, Korea, You can do one-stop shopping here. And customized orders are acceptable. Real business is to get win-win situation, if possible, we would like to provide more support for customers. Welcome all nice buyers communicate details of products and ideas with us!!
We are old friends, the company's product quality has been always very good and this time the price is also very cheap.




